MEMS/MOEMS packaging : concepts, designs, materials and processes
by
 
Gilleo, Ken

Title
: 
MEMS/MOEMS packaging : concepts, designs, materials and processes

Author
: 
Gilleo, Ken

ISBN
: 
9780071455565

Personal Author
: 
Gilleo, Ken

Publication Information
: 
London : McGraw-Hill, 2005

Physical Description
: 
220 p. ; 23 cm

General Note
: 
Includes index

Subject Term
: 
Microelectronic packaging
 
Microelectromechanical system
 
Optoelectronic devices


LibraryItem BarcodeMaterial TypeShelf Number
Perpustakaan Kuala Lumpur39292004005197Adult Reference(R) 621.381/GIL