Photomask fabrication technology
by
Eynon, Benjamin G.
Title
:
Photomask fabrication technology
Author
:
Eynon, Benjamin G.
ISBN
:
9780071445634
Personal Author
:
Eynon, Benjamin G.
Publication Information
:
London : McGraw-Hill, 2005
Physical Description
:
571 p. ; 23 cm
General Note
:
Includes index
Subject Term
:
Integrated circuit- masks
Masks (electronic)
Microlithography
| Library | Item Barcode | Material Type | Shelf Number |
|---|
| Perpustakaan Kuala Lumpur | 39292004005198 | Adult Reference | (R) 621.3815/EYN |