Introduction to vacuum technology
by
 
Hata, David M.

Title
: 
Introduction to vacuum technology

Author
: 
Hata, David M.

ISBN
: 
9780130450180

Personal Author
: 
Hata, David M.

Publication Information
: 
New Jersey : Pearson, 2008.

Physical Description
: 
187p. : 23 cm.

General Note
: 
Includes index.

Subject Term
: 
Vacuum technology